Neutralbeametching相关论文
The anodic aluminum oxide (AAO) is used as the solid mask,due to the strong bonding of Al2O3,it shows superior mechanica......
Low Plasma Induced Damaged Neutral Beam Etching of Metal Gate in Metal Gate/High-k Dielectric CMOSFE
As the critical dimension (CD) of the metal-oxide-semiconductor field effect transistor (MOSFET) is scaled down to 45nm ......
